Physical Vapor Deposition Simulations of Microstructure Evolution
نویسندگان
چکیده
منابع مشابه
Ti-Cr-N Coatings Deposited by Physical Vapor Deposition on AISI D6 Tool Steels
In this study, physical vapor deposition (PVD) Ti-Cr-N coatings were deposited at two different temperatures 100 and 400ºC on hardened and tempered tool steel substrates. The influence of the applied deposition temperature on the physical and mechanical properties of coatings such as roughness, thickness, phase composition, hardness and Young’s modulus were evaluated. Phase compositions were st...
متن کاملDirect simulation Monte Carlo modeling of e-beam metal deposition
Three-dimensional direct simulation Monte Carlo ͑DSMC͒ method is applied here to model the electron-beam physical vapor deposition of copper thin films. Various molecular models for copper-copper interactions have been considered and a suitable molecular model has been determined based on comparisons of dimensional mass fluxes obtained from simulations and previous experiments. The variable hard ...
متن کاملMicrostructure and optical properties of scandium oxide thin films prepared by metalorganic chemical-vapor deposition
Dense, high-index, and reproducible scandium oxide (Sc2O3) thin films with high mechanical strength were grown on glass substrates by metalorganic chemical-vapor deposition. The influence of deposition temperature on the microstructure evolution and optical properties of Sc2O3 thin films was investigated by x-ray diffraction, scanning electron microscopy, atomic-force microscopy, transmission e...
متن کاملPii: S1359-6454(96)00256-x
A two-step Monte Carlo method for atomistically simulating low energy physical vapor deposition processes is developed and used to model the two-dimensional physical vapor deposition of nickel. The method consists of an impact approximation for the initial adatom adsorption on a surface and a multipath diffusion analysis to simulate subsequent surface morphology and interior atomic structure ev...
متن کاملPii: S1359-6454(96)00283-2
The morphology and microstructure of metallic thin films synthesized by physical vapor deposition are known to be sensitive functions of the incident flux, its angular distribution and kinetic energy as well as the substrate temperature. Using an embedded atom method to represent the interatomic interactions, two-dimensional molecular dynamics simulations have been conducted to identify the rol...
متن کامل